Physics 366: Intermediate Experimental Physics

Thin Film Deposition and Characterization

This laboratory based course is to familiarize yourself with sputtering process, thermal evaporation, x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), Hall effect, and laser spectroscopy. You will prepare your own samples in the lab before characterizing them with techniques mainly in the Keck Microanalysis Laboratory in Salazar 2009B. This course is also an introduction to elements identification and chemical analysis using energy dispersive x-ray (EDX) spectrometer which is attached to the SEM.

Text: No textbook is adopted for this course. All lab-related material will be posted on the web.

Learning Objectives

Course Schedule

References:

SEM

1. Oliver C Wells, "Scanning electron microscopy," McGraw-Hill, 1974.

2. Richard Edward Lee, "Scanning electron microscopy and x-ray microanalysis," Prentice-Hall, 1993.

3. Joseph. I. Goldstein, D. E. Newbury, et al., Scanning Electron Microscopy and X-ray Microanalysis, 3rd edition, hardcover, Plenum Press, NY, Feb. 2003.

EDX

1. EDX: Advancing Materials Characterization

2. Microchemical Analysis Systems

3. EDX and WDX

4. EDX Testing and Analysis

AFM

1. Atomic Force Microscopy/Scanning Tunneling Microscopy III
    Samuel H. Cohen, Marcia L. Lightbody, et al., Kluwer Academic Publishers, 1999

2. Scanning Probe Microscopy

3. How AFM Works

Disability: If you have a disability and need special consideration, please contact the Office of Disabled Student Services ( DSS ). Located in Salazar Hall, Room 1049, Phone 664-2677.

Important University policies, such as add/drop classes, cheating and plagiarism, grade appeal procedures, etc. can be found here.

Email me if you have questions or comments.

Last updated: 1/8/2013